Micron is on track to incorporate EUV for DRAM production at its Taichung plant in central Taiwan, DigiTimes’ Siu Han and Jessie Shen report. Micron plans to adopt EUV tools for the next three generations of DRAM processes, namely 1-gamma, 1-delta and 1-epsilon, according to Donghui Lu, head of Micron Taiwan. Reference Link
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