Axcelis announced multiple new penetrations and follow-on shipments of the Purion Power Series vion implanter systems. The shipments were delivered to fabs throughout Asia, Europe and the US operated by SiC power device chipmakers. The models of Purion Power Series implanters purchased, including the Purion H200 high current, Purion XE high energy and the Purion M medium current implanters, will be used in high volume production of power devices supporting automotive industry EV applications. The company forecasts that the power device market will represent 35% to 40% of its systems shipments in 2022, and expects this to grow further in 2023.
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